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Cross-axis sensitivity reduction of a silicon MEMS piezoresistive accelerometer
A. Ravi Sankar, S. Das, S. K. LahiriVolume:
15
Language:
english
Pages:
8
DOI:
10.1007/s00542-008-0740-y
Date:
April, 2009
File:
PDF, 332 KB
english, 2009