Fabrication of high-aspect-ratio electrode array by...

Microsystem Technologies 2009 / 04 Vol. 15; Iss. 4

Fabrication of high-aspect-ratio electrode array by combining UV-LIGA with micro electro-discharge machining

Yang-Yang Hu, D. Zhu, N. S. Qu, Y. B. Zeng, P. M. Ming
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Volume:
15
Language:
english
Pages:
7
DOI:
10.1007/s00542-008-0745-6
Date:
April, 2009
File:
PDF, 469 KB
english, 2009
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