Fabrication of compliant high aspect ratio silicon...

Microsystem Technologies 2009 / 05 Vol. 15; Iss. 5

Fabrication of compliant high aspect ratio silicon microelectrode arrays using micro-wire electrical discharge machining

Dinesh Rakwal, Sumet Heamawatanachai, Prashant Tathireddy, Florian Solzbacher, Eberhard Bamberg
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Volume:
15
Language:
english
Pages:
9
DOI:
10.1007/s00542-009-0792-7
Date:
May, 2009
File:
PDF, 807 KB
english, 2009
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