Resonant frequency sensitive MEMS bandpass filter using...

Microsystem Technologies 2009 / 07 Vol. 15; Iss. 7

Resonant frequency sensitive MEMS bandpass filter using capacitive sensing scheme

In-Hyouk Song, Yves-Alain Peter, Michel Meunier
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Volume:
15
Language:
english
Pages:
7
DOI:
10.1007/s00542-009-0823-4
Date:
July, 2009
File:
PDF, 609 KB
english, 2009
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