Slip model for the ultra-thin gas-lubricated slider...

Microsystem Technologies 2009 / 06 Vol. 15; Iss. 6

Slip model for the ultra-thin gas-lubricated slider bearings of an electrostatic micromotor in MEMS

Wen-Ming Zhang, Guang Meng, Jian-Bin Zhou, Jie-Yu Chen
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Volume:
15
Language:
english
Pages:
9
DOI:
10.1007/s00542-009-0828-z
Date:
June, 2009
File:
PDF, 671 KB
english, 2009
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