A novel active vibration isolator applied for micro-gyro by array of deposited electrodes
Nan-Chyuan Tsai, Chung-Yang Sue, Bing-Hong LiouVolume:
15
Language:
english
Pages:
10
DOI:
10.1007/s00542-009-0833-2
Date:
July, 2009
File:
PDF, 720 KB
english, 2009