Xe laser-plasma EUV radiation source with a wavelength near...

Journal of Applied Physics 2019 / 09 Vol. 126; Iss. 10

Xe laser-plasma EUV radiation source with a wavelength near 11 nm—Optimization and conversion efficiency

Kalmykov, S. G., Butorin, P. S., Sasin, M. E.
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Volume:
126
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.5115785
Date:
September, 2019
File:
PDF, 1.05 MB
english, 2019
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