New high fill-factor triangular microlens array fabrication...

Microsystem Technologies 2009 / 08 Vol. 15; Iss. 8

New high fill-factor triangular microlens array fabrication method using UV proximity printing

Tsung-Hung Lin, Hsiharng Yang, Ching-Kong Chao, Shih-Yu Hung
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Volume:
15
Pages:
2
DOI:
10.1007/s00542-009-0888-0
Date:
August, 2009
File:
PDF, 158 KB
2009
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