Modeling and simulation of levitation control for a...

Microsystem Technologies 2010 / 03 Vol. 16; Iss. 3

Modeling and simulation of levitation control for a micromachined electrostatically suspended gyroscope

Qijun Xiao, Wenyuan Chen, Shengyong Li, Feng Cui, Weiping Zhang
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Volume:
16
Language:
english
Pages:
10
DOI:
10.1007/s00542-009-0927-x
Date:
March, 2010
File:
PDF, 607 KB
english, 2010
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