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Hot punching on an 8 inch substrate as an alternative technology to produce holes on a large scale
Bastian E. Rapp, Marc Schneider, Matthias WorgullVolume:
16
Language:
english
Pages:
6
DOI:
10.1007/s00542-009-0943-x
Date:
July, 2010
File:
PDF, 475 KB
english, 2010