Development of near hermetic silicon/glass cavities for...

Microsystem Technologies 2010 / 07 Vol. 16; Iss. 7

Development of near hermetic silicon/glass cavities for packaging of integrated lithium micro batteries

Krystan Marquardt, Robert Hahn, Martin Blechert, Marco Lehmann, Michael Töpper, Martin Wilke, Peter Semionyk, Maria von Suchodoletz, Herbert Reichl
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Volume:
16
Language:
english
Pages:
11
DOI:
10.1007/s00542-009-0954-7
Date:
July, 2010
File:
PDF, 851 KB
english, 2010
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