Optical micro-paddle beam deflection measurement for...

Microsystem Technologies 2010 / 07 Vol. 16; Iss. 7

Optical micro-paddle beam deflection measurement for electrostatic mechanical testing of nano-scale thin film application to MEMS

Chi-Jia Tong, Ya-Chi Cheng, Ming-Tzer Lin, Kuan-Jung Chung, Jiong-Shiun Hsu, Chung-Lin Wu
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Volume:
16
Language:
english
Pages:
7
DOI:
10.1007/s00542-009-0999-7
Date:
July, 2010
File:
PDF, 545 KB
english, 2010
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