Fabrication and performance assessment of a novel stress...

Microsystem Technologies 2010 / 10 Vol. 16; Iss. 10

Fabrication and performance assessment of a novel stress sensor applied for micro-robotics

Yu-Ming Huang, Nan-Chyuan Tsai, Jing-Yao Lai
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Volume:
16
Language:
english
Pages:
7
DOI:
10.1007/s00542-010-1091-z
Date:
October, 2010
File:
PDF, 551 KB
english, 2010
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