Characterization of an electro-thermal micro gripper and tip sharpening using FIB technique
A. Deutschinger, U. Schmid, M. Schneider, W. Brenner, H. Wanzenböck, B. Volland, Tzv. Ivanov, I. W. RangelowVolume:
16
Language:
english
Pages:
8
DOI:
10.1007/s00542-010-1110-0
Date:
November, 2010
File:
PDF, 576 KB
english, 2010