Fabrication of steel roller imprinting molds through...

Microsystem Technologies 2010 / 11 Vol. 16; Iss. 11

Fabrication of steel roller imprinting molds through adapting conventional planar micro fabrication tools

Meng-Chi Huang, Chien-Chung Fu
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Volume:
16
Language:
english
Pages:
9
DOI:
10.1007/s00542-010-1120-y
Date:
November, 2010
File:
PDF, 795 KB
english, 2010
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