Modeling of the intrinsic stress effect on the resonant...

Microsystem Technologies 2010 / 12 Vol. 16; Iss. 12

Modeling of the intrinsic stress effect on the resonant frequency of NEMS resonators integrated by beams with variable cross-section

A. L. Herrera-May, L. A. Aguilera-Cortés, P. J. García-Ramírez, H. Plascencia-Mora, M. Torres-Cisneros
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Volume:
16
Language:
english
Pages:
8
DOI:
10.1007/s00542-010-1134-5
Date:
December, 2010
File:
PDF, 492 KB
english, 2010
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