Fabrication and characterization of MEMS-based flow sensors...

Microsystem Technologies 2011 / 04 Vol. 17; Iss. 4

Fabrication and characterization of MEMS-based flow sensors based on hot films

Rong-Hua Ma, Yu-Hsiang Wang, Sheng-Ling Chiang, Chia-Yen Lee
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
17
Language:
english
Pages:
6
DOI:
10.1007/s00542-010-1156-z
Date:
April, 2011
File:
PDF, 391 KB
english, 2011
Conversion to is in progress
Conversion to is failed