A method of gap control based on the principle of equal...

Microsystem Technologies 2011 / 01 Vol. 17; Iss. 1

A method of gap control based on the principle of equal thickness interference for HARNS fabrication

Jie Zhou, Gang Liu, Xiaobo Zhang, Ying Xiong, Yangchao Tian
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Volume:
17
Language:
english
Pages:
7
DOI:
10.1007/s00542-010-1164-z
Date:
January, 2011
File:
PDF, 456 KB
english, 2011
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