Fabrication of a metal protector for a fiber sensor using...

Microsystem Technologies 2011 / 04 Vol. 17; Iss. 4

Fabrication of a metal protector for a fiber sensor using through-mask electrochemical micromachining with pulse DC power

Wei-Te Wu, Wei-Hung Shih, Chih-To Wang
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Volume:
17
Language:
english
Pages:
8
DOI:
10.1007/s00542-011-1225-y
Date:
April, 2011
File:
PDF, 440 KB
english, 2011
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