Robust control design for precision positioning of a...

Microsystem Technologies 2011 / 06 Vol. 17; Iss. 5-7

Robust control design for precision positioning of a generic piezoelectric system with consideration of microscopic hysteresis effects

Paul C.-P. Chao, Pen-Yen Liao, Meng-Yen Tsai, Chin-Teng Lin
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Volume:
17
Language:
english
Pages:
15
DOI:
10.1007/s00542-011-1250-x
Date:
June, 2011
File:
PDF, 1.11 MB
english, 2011
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