Auto-calibration of capacitive MEMS accelerometers based on...

Microsystem Technologies 2011 / 03 Vol. 17; Iss. 3

Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage

L. A. Rocha, R. A. Dias, E. Cretu, L. Mol, R. F. Wolffenbuttel
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Volume:
17
Language:
english
Pages:
8
DOI:
10.1007/s00542-011-1252-8
Date:
March, 2011
File:
PDF, 614 KB
english, 2011
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