New high fill-factor dual-curvature microlens array...

Microsystem Technologies 2011 / 04 Vol. 17; Iss. 4

New high fill-factor dual-curvature microlens array fabrication using UV proximity printing

Tsung-Hung Lin, Hsiharng Yang, Ching-Kong Chao, Shih-Yu Hung, Jen-Sung Hsu
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Volume:
17
Language:
english
Pages:
7
DOI:
10.1007/s00542-011-1282-2
Date:
April, 2011
File:
PDF, 803 KB
english, 2011
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