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Proton beam writing a platform technology for high quality three-dimensional metal mold fabrication for nanofluidic applications
J. A. van Kan, P. G. Shao, Y. H. Wang, P. MalarVolume:
17
Language:
english
Pages:
9
DOI:
10.1007/s00542-011-1321-z
Date:
September, 2011
File:
PDF, 616 KB
english, 2011