Polymeric (SU-8) optical microscanner driven by...

Microsystem Technologies 2011 / 09 Vol. 17; Iss. 9

Polymeric (SU-8) optical microscanner driven by electrostatic actuation

Seung-Hwan Moon, Min-Ho Jun, Jae-Yong An, Jong-Hyun Lee
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Volume:
17
Language:
english
Pages:
7
DOI:
10.1007/s00542-011-1329-4
Date:
September, 2011
File:
PDF, 700 KB
english, 2011
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