Review of MEMS flow sensors based on artificial hair cell...

Microsystem Technologies 2011 / 09 Vol. 17; Iss. 9

Review of MEMS flow sensors based on artificial hair cell sensor

Mohd Norzaidi Mat Nawi, Asrulnizam Abd Manaf, Mohd Rizal Arshad, Othman Sidek
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Volume:
17
Language:
english
Pages:
10
DOI:
10.1007/s00542-011-1330-y
Date:
September, 2011
File:
PDF, 842 KB
english, 2011
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