![](/img/cover-not-exists.png)
Photoresist-based integration of enzyme functionality into MEMS
Nicole Thomas, Ilkka Lähdesmäki, Babak A. ParvizVolume:
17
Language:
english
Pages:
6
DOI:
10.1007/s00542-011-1333-8
Date:
September, 2011
File:
PDF, 443 KB
english, 2011