Coupled effects of gold electroplating and electrochemical...

Microsystem Technologies 2011 / 10 Vol. 17; Iss. 10-11

Coupled effects of gold electroplating and electrochemical discharge machining processes on the performance improvement of a capacitive accelerometer

A. Ravi Sankar, V. Swathi Sree Bindu, S. Das
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Volume:
17
Language:
english
Pages:
10
DOI:
10.1007/s00542-011-1350-7
Date:
October, 2011
File:
PDF, 1.95 MB
english, 2011
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