Design, fabrication and testing of a high performance...

Microsystem Technologies 2012 / 01 Vol. 18; Iss. 1

Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures

A. Ravi Sankar, J. Grace Jency, S. Das
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Volume:
18
Language:
english
Pages:
15
DOI:
10.1007/s00542-011-1371-2
Date:
January, 2012
File:
PDF, 976 KB
english, 2012
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