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Study of residual stress-induced deformation of multilayer cantilever for maskless microplasma etching
Li Wen, Zhen Yuan, Leili Cheng, Hongjiang Zeng, Jiaru ChuVolume:
18
Language:
english
Pages:
6
DOI:
10.1007/s00542-011-1395-7
Date:
January, 2012
File:
PDF, 461 KB
english, 2012