Plastic reshaping of silicon microstructures: process,...

Microsystem Technologies 2001 / 11 Vol. 7; Iss. 4

Plastic reshaping of silicon microstructures: process, characterization and application

E. Gärtner, J. Frühauf, E. Jänsch
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Volume:
7
Language:
english
Pages:
6
DOI:
10.1007/s005420000078
Date:
November, 2001
File:
PDF, 234 KB
english, 2001
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