Application of electroplating in MEMS-micromachining...

Microsystem Technologies 2001 / 11 Vol. 7; Iss. 4

Application of electroplating in MEMS-micromachining exemplified by a microrelay

M. Becker, D. Lütke Notarp, J. Vogel, E. Kieselstein, J.-P. Sommer, K. Brämer, V. Großer, W. Benecke, B. Michel
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Volume:
7
Language:
english
Pages:
7
DOI:
10.1007/s005420000086
Date:
November, 2001
File:
PDF, 282 KB
english, 2001
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