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Proton micromachining: a new technique for the production of three-dimensional microstructures
J.A. van Kan, J. L. Sanchez, T. Osipowicz, F. WattVolume:
6
Language:
english
Pages:
4
DOI:
10.1007/s005420050002
Date:
February, 2000
File:
PDF, 314 KB
english, 2000