Optical DUV-lithography for high microstructures

Microsystem Technologies 1996 / 11 Vol. 3; Iss. 1

Optical DUV-lithography for high microstructures

A. Heuberger, B. Löchel
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Volume:
3
Language:
english
Pages:
6
DOI:
10.1007/s005420050045
Date:
November, 1996
File:
PDF, 1.31 MB
english, 1996
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