InP-based micromachined Mach-Zehnder interferometer stress...

Microsystem Technologies 1997 / 05 Vol. 3; Iss. 3

InP-based micromachined Mach-Zehnder interferometer stress sensors

C. Seassal, J. L. Leclercq, G. Fierling, X. Letartre, M. Gendry, P. Viktorovitch, Y. Bertic, A. Trouillet, A. Cachard, P. Benech, J. P. Lainé, F. Sidoroff
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Volume:
3
Language:
english
Pages:
6
DOI:
10.1007/s005420050071
Date:
May, 1997
File:
PDF, 1.92 MB
english, 1997
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