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Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamline
S. Sugiyama, Y. Zhang, M. Hosaka, H. Ueno, O. Tabata, S. Konishi, R. MaedaVolume:
4
Language:
english
Pages:
3
DOI:
10.1007/s005420050095
Date:
February, 1998
File:
PDF, 607 KB
english, 1998