New development strategies for high aspect ratio...

Microsystem Technologies 1998 / 02 Vol. 4; Iss. 2

New development strategies for high aspect ratio microstructures

J. Zanghellini, S. Achenbach, A. El-Kholi, J. Mohr, F. J. Pantenburg
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Volume:
4
Language:
english
Pages:
4
DOI:
10.1007/s005420050104
Date:
February, 1998
File:
PDF, 160 KB
english, 1998
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