![](/img/cover-not-exists.png)
Photoresist application for the LIGA process
B. Chaudhuri, H. Guckel, J. Klein, K. FischerVolume:
4
Language:
english
Pages:
4
DOI:
10.1007/s005420050121
Date:
July, 1998
File:
PDF, 197 KB
english, 1998