Photoresist application for the LIGA process

Photoresist application for the LIGA process

B. Chaudhuri, H. Guckel, J. Klein, K. Fischer
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Volume:
4
Language:
english
Pages:
4
DOI:
10.1007/s005420050121
Date:
July, 1998
File:
PDF, 197 KB
english, 1998
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