Design and fabrication of one millimeter high structures

Microsystem Technologies 1998 / 07 Vol. 4; Iss. 4

Design and fabrication of one millimeter high structures

K. Fischer, J. Klein, B. Chaudhuri, H. Guckel
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Volume:
4
Language:
english
Pages:
4
DOI:
10.1007/s005420050125
Date:
July, 1998
File:
PDF, 289 KB
english, 1998
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