Reduction of mechanical stress in micromachined components caused by humidity-induced volume expansion of polymer layers
R. Buchhold, A. Nakladal, G. Gerlach, K. Sahre, K.-J. Eichhorn, M. MüllerVolume:
5
Language:
english
Pages:
10
DOI:
10.1007/s005420050133
Date:
October, 1998
File:
PDF, 523 KB
english, 1998