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An electrostatic microactuator using LIGA process for a magnetic head tracking system of hard disk drives
S. Nakamura, K. Suzuki, M. Ataka, H. Fujita, S. Basrour, V. Soumann, M. Labachelerie, W. DaniauVolume:
5
Language:
english
Pages:
3
DOI:
10.1007/s005420050144
Date:
December, 1998
File:
PDF, 181 KB
english, 1998