Multilayer polyimide film substrates for interconnections in microsystems
A. Fach, Y. Athanassov, U. Brunner, D. Hablützel, B. Ketterer, J. LinkVolume:
5
Language:
english
Pages:
3
DOI:
10.1007/s005420050158
Date:
July, 1999
File:
PDF, 273 KB
english, 1999