Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes
G. Schröpfer, M. de Labachelerie, C. R. TellierVolume:
5
Language:
english
Pages:
6
DOI:
10.1007/s005420050163
Date:
July, 1999
File:
PDF, 416 KB
english, 1999