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Active material micro-actuator arrays fabricated with SU-8 resin
B. J. Pokines, J. Tani, M. Esashi, T. Hamano, K. Mizuno, D. J. InmanVolume:
7
Language:
english
Pages:
3
DOI:
10.1007/s005420100093
Date:
October, 2001
File:
PDF, 97 KB
english, 2001