Active material micro-actuator arrays fabricated with SU-8...

Microsystem Technologies 2001 / 10 Vol. 7; Iss. 3

Active material micro-actuator arrays fabricated with SU-8 resin

B. J. Pokines, J. Tani, M. Esashi, T. Hamano, K. Mizuno, D. J. Inman
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Volume:
7
Language:
english
Pages:
3
DOI:
10.1007/s005420100093
Date:
October, 2001
File:
PDF, 97 KB
english, 2001
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