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On the study of microstructure of annealed C+and H2+ Co_implanted 6H-SiC
Ye, Chao, Ran, Guang, Zhou, Wei, Feng, Qijie, Huang, Jingchi, Li, NingVolume:
118
Language:
english
Journal:
Progress in Nuclear Energy
DOI:
10.1016/j.pnucene.2019.103143
Date:
January, 2020
File:
PDF, 2.24 MB
english, 2020