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AFM Observation of Initial Oxidation Stage of 4H-SiC (0001) in Electrochemical Mechanical Polishing
Yang, Xu, Ohkubo, Yuji, Endo, Katsuyoshi, Yamamura, KazuyaVolume:
68
Year:
2018
Language:
english
Journal:
Procedia CIRP
DOI:
10.1016/j.procir.2017.12.129
File:
PDF, 2.13 MB
english, 2018