AFM Observation of Initial Oxidation Stage of 4H-SiC (0001)...

AFM Observation of Initial Oxidation Stage of 4H-SiC (0001) in Electrochemical Mechanical Polishing

Yang, Xu, Ohkubo, Yuji, Endo, Katsuyoshi, Yamamura, Kazuya
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
68
Year:
2018
Language:
english
Journal:
Procedia CIRP
DOI:
10.1016/j.procir.2017.12.129
File:
PDF, 2.13 MB
english, 2018
Conversion to is in progress
Conversion to is failed