Uncertainty analysis of a six-degree-of-freedom surface...

Procedia CIRP 2018 Vol. 75

Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage

Shimizu, Yuki, Furuta, Masaya, Chen, Yuan-Liu, Chen, Xiuguo, Matsukuma, Hiraku, Gao, Wei
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Volume:
75
Year:
2018
Language:
english
Journal:
Procedia CIRP
DOI:
10.1016/j.procir.2018.04.041
File:
PDF, 952 KB
english, 2018
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