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Simulation of laser ablation mechanism of silicon nitride by ultrashort pulse laser
Soltani, B., Hojati, F., Daneshi, A., Azarhoushang, B.Volume:
82
Year:
2019
Language:
english
Journal:
Procedia CIRP
DOI:
10.1016/j.procir.2019.04.060
File:
PDF, 1.09 MB
english, 2019