Evaluation of Particle Beam Lithography for Fabrication of...

Procedia Manufacturing 2019 Vol. 30

Evaluation of Particle Beam Lithography for Fabrication of Metallic Nano-structures

Shahali, Hesam, Hasan, Jafar, Wang, Hongxia, Tesfamichael, Tuquabo, Yan, Cheng, Yarlagadda, Prasad K.D.V.
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Volume:
30
Year:
2019
Language:
english
Journal:
Procedia Manufacturing
DOI:
10.1016/j.promfg.2019.02.038
File:
PDF, 697 KB
english, 2019
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