Influence of substrate stiffness and of PVD parameters on the microstructure and tension fracture characteristics of TiN thin films
da Silva, Felipe C., Tunes, Matheus A., Sagás, Julio C., Schön, Cláudio G.Volume:
13
Year:
2018
Language:
english
Journal:
Procedia Structural Integrity
DOI:
10.1016/j.prostr.2018.12.109
File:
PDF, 681 KB
english, 2018