Defect-induced Stress Imaging in Single and Multi-crystalline Semiconductor Materials
Herms, Martin, Wagner, Matthias, Kayser, Stefan, Kießling, Frank M., Poklad, Anna, Zhao, Ming, Kretzer, UlrichVolume:
5
Year:
2018
Language:
english
Journal:
Materials Today: Proceedings
DOI:
10.1016/j.matpr.2018.03.064
File:
PDF, 2.90 MB
english, 2018